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Development of meso-scale milling machine tool and its performance analysis

LI Hongtao, LAI Xinmin, LI Chengfeng, LIN Zhongqin, MIAO Jiancheng, NI Jun

《机械工程前沿（英文）》 2008年第3卷第1期页码 59-65 doi: 10.1007/s11465-008-0005-6

摘要： To overcome the shortcomings of current technologies for meso-scale manufacturing such as MEMS and ultra precision machining, this paper focuses on the investigations on the meso milling process with a miniaturized machine tool. First, the related technologies for the process mechanism studies are investigated based on the analysis of the characteristics of the meso milling process. An overview of the key issues is presented and research approaches are also proposed. Then, a meso-scale milling machine tool system is developed. The subsystems and their specifications are described in detail. Finally, some tests are conducted to evaluate the performance of the system. These tests consist of precision measurement of the positioning subsystem, the test for machining precision evaluation, and the experiments for machining mechanical parts with complex features. Through test analysis, the meso milling process with a miniaturized machine tool is proved to be feasible and applicable for meso manufacturing.

关键词： applicable machining mechanical overview positioning subsystem miniaturized

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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning

Chengyuan LIANG, Fang YUAN, Xuedong CHEN, Wei JIANG, Lizhan ZENG, Xin LUO

《机械工程前沿（英文）》 2019年第14卷第3期页码 255-272 doi: 10.1007/s11465-019-0538-x

摘要： Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.

关键词： nano-precision positioning stage analysis and design structural and dynamic parameters dynamic accuracy systematic modeling

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Kinematic calibration of precise 6-DOF stewart platform-type positioning systems for radio telescope

Juan Carlos JáUREGUI, Eusebio E. HERNáNDEZ, Marco CECCARELLI, Carlos LóPEZ-CAJúN, Alejandro GARCíA

《机械工程前沿（英文）》 2013年第8卷第3期页码 252-260 doi: 10.1007/s11465-013-0249-7

摘要：

The pose accuracy of a parallel robot is a function of the mobile platform posture. Thus, there is no a single value of the robot’s accuracy. In this paper, two novel methods for estimating the accuracy of parallel robots are presented. In the first method, the pose accuracy estimation is calculated by considering the propagation of each error, i.e., error variations are considered as a function of the actuator’s stroke. In the second method, it is considered that each actuator has a constant error at any stroke. Both methods can predict pose accuracy of precise robots at design stages, and/or can reduce calibration time of existing robots. An example of a six degree-of-freedom parallel manipulator is included to show the application of the proposed methods.

关键词： pose errors error estimation parallel robot radio telescopes

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Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane

Hua LIU, Xin XIE, Ruoyu TAN, Lianchao ZHANG, Dapeng FAN

《机械工程前沿（英文）》 2017年第12卷第2期页码 265-278 doi: 10.1007/s11465-017-0453-y

摘要：

Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In this study, a 2-degree-of-freedom linear compliant positioning stage (LCPS) is developed by mechatronic design to balance the interacting performance indicators and realize the desired positioning stage. The key parameters and the coupling of the structure and actuators are completely considered in the design. The LCPS consists of four voice coil motors (VCMs), which are conformally designed for compactness, and six spatial leaf spring parallelograms. These parallelograms are serially connected for a large travel range and a high out-of-plane payload capacity. The mechatronic model is established by matrix structural analysis for structural modeling and by Kirchhoff’s law for the VCMs. The sensitivities of the key parameters are analyzed, and the design parameters are subsequently determined. The analytical model of the stage is confirmed by experiments. The stage has a travel range of 4.4 mm× 7.0 mm and a 0.16% area ratio of workspace to the outer dimension of the stage. The values of these performance indicators are greater than those of any existing stage reported in the literature. The closed-loop bandwidth is 9.5 Hz in both working directions. The stage can track a circular trajectory with a radius of 1.5 mm, with 40 mm error and a resolution of lower than 3 mm. The results of payload tests indicate that the stage has at least 20 kg out-of-plane payload capacity.

关键词： mechatronic design linear compliant positioning stage large travel range high out-of-plane payload capacity spatial parallelogram voice coil motor sensitivity analysis

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核废物库吊车高精度自动定位的技术实现

栾秀春,韩伟实,王俊玲,杨爱光

《中国工程科学》 2010年第12卷第3期页码 45-50

摘要：

阐述了田湾核电站核废物库21UKT吊车自动化改造工程中高精度自动定位的技术实现，包括控制系统的硬件配置和软件配置、控制逻辑、程序结构以及变频调速函数曲线，并给出了现场检测结果。

关键词：核废物吊车自动控制定位

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如果全球定位系统失灵了怎么办？

Mitch Leslie

《工程（英文）》 2019年第5卷第6期页码 985-986 doi: 10.1016/j.eng.2019.10.007

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数控车床丝杠进给系统刚度对定位精度的影响

吴南星,胡如夫,孙庆鸿

《中国工程科学》 2004年第6卷第9期页码 46-49

摘要：

数控车床丝杠进给系统刚度对系统的失动量和定位精度影响较大。基于进给系统质量和弹簧力学模型，给出了进给系统轴向刚度和扭转刚度对失动量的影响与定位误差的解析表达式，为进给系统结构设计、降低系统的失动量和提高系统的定位精度提供了理论依据；结合实例进行了应用分析计算，取得了明显效果。

关键词：数控机床刚度失动量定位精度

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悬索桥钢索塔下塔柱大节段吊装施工技术

张平,肖文福,黄涛,蒋建,蔡伟

《中国工程科学》 2010年第12卷第4期页码 58-62

摘要：

泰州大桥为国内首次主跨跨径超越千米的三塔两跨悬索桥，中塔首次采用纵向人字型、横向门字型钢结构塔。文章对钢塔下塔柱大节段安装、定位、调位及设备选型、精度控制等施工技术作简单的介绍。

关键词：钢塔大节段吊装定位调位精度控制定位系统

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澳大利亚未来的导航定位技术

Nicholas Brown, John Dawson, Ryan Ruddick

《工程（英文）》 2020年第6卷第8期页码 857-859 doi: 10.1016/j.eng.2020.07.012

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A space solar cell bonding robot

FU Zhuang, ZHAO Yan-zheng, LIU Ren-qiang, DONG Zhi

《机械工程前沿（英文）》 2006年第1卷第3期页码 360-363 doi: 10.1007/s11465-006-0027-x

摘要： A space solar cell bonding robot system which consists of a three-axis Cartesian coordinate s robot, coating device, bonding device, orientation plate, and control subsystem was studied. A method, which can control the thickness o

关键词： Cartesian coordinate thickness three-axis Cartesian orientation control subsystem

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Bi-modes alternation stepping ultrasonic motors

JIN Jiamei, ZHAO Chunsheng

《机械工程前沿（英文）》 2008年第3卷第1期页码 101-105 doi: 10.1007/s11465-008-0018-1

摘要： Based on the principle of alternative operation of two bending vibration modes in an annular stator, this paper presents a standing-wave stepping ultrasonic motor characterized by no accumulative errors driven by an open-loop control circuitry. The driving forces are generated from the motions of projections on the stator in two modes. The positioning of the motor is achieved by the cooperation between the stator projections and rotor teeth, and the number of the rotors determines the stepping angle of the motor. Two-phase sinusoidal signals corresponding to the two modal frequencies drive the motor bi-direction stepping rotation via a switch unit. The prototype runs steadily without miss-step on trial. The single-step angle displacement of the motor is 2.5°.

关键词： miss-step bi-direction Two-phase sinusoidal positioning accumulative

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基于惯性能时空最优分布的高加速轻载机构精密定位方法 Article

陈新,白有盾,杨志军,高健,陈贡发

《工程（英文）》 2015年第1卷第3期页码 391-398 doi: 10.15302/J-ENG-2015063

摘要：

高速运动精密定位是微电子封装设备中高加速轻载执行机构的基本运动需求。本文推导了高加速机构瞬态非线性动力学响应方程，揭示了刚度、频率、阻尼 (与材料空间布局相关) 和驱动频率 (与运动规划相关) 是主要影响因素。据此，在满足高加速机构精密定位的条件下，笔者提出了一种基于最优非线性动力学响应的结构优化和速度规划新方法。在结构优化中，首先分析了目前流行的基于等效静态载荷的柔性多体动力学优化方法未充分考虑惯性载荷的不足，然后提出了基于等效模态的柔性多体动力学最优动态响应优化新方法；在速度规划上，针对传统的几何光滑方法不能反映系统动态特性的缺陷，提出了基于变边界条件非线性动力学响应优化的速度规划新方法。将所提方法应用到高速固晶焊头的优化设计中，通过结构优化，降低振幅超过20%，再经非对称变加速规划，缩短定位时间超过40%。本文提出的方法为微电子封装类装备等高加速轻载机构精密定位的实现提供了有效的理论支撑和解决途径。

关键词：高加速轻载机构精密定位时空分布惯性能等效静态载荷方法速度规划

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全球定位系统——建立太空卫星通信，改变地球上的日常生活

Peter Weiss

《工程（英文）》 2021年第7卷第3期页码 290-303 doi: 10.1016/j.eng.2021.02.001

关键词：工程成就

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Analysis and control of micro-stepping characteristics of ultrasonic motor

Ning CHEN, Jieji ZHENG, Xianliang JIANG, Shixun FAN, Dapeng FAN

《机械工程前沿（英文）》 2020年第15卷第4期页码 585-599 doi: 10.1007/s11465-019-0577-3

摘要： Micro-stepping motion of ultrasonic motors satisfies biomedical applications, such as cell operation and nuclear magnetic resonance, which require a precise compact-structure non-magnetization positioning device. When the pulse number is relatively small, the stopping characteristics have a non-negligible effect on the entire stepwise process. However, few studies have been conducted to show the rule of the open-loop stepwise motion, especially the shutdown stage. In this study, the modal differences of the shutdown stage are found connected with amplitude and velocity at the turn-off instant. Changes of the length in the contact area and driving zone as well as the input currents, vibration states, output torque, and axial pressure are derived by a simulation model to further explore the rules. The speed curves and vibration results in functions of different pulse numbers are compared, and the stepwise motion can be described by a two-stage two-order transfer function. A test workbench based on the Field Programmable Gate Array is built for acquiring the speed, currents, and feedback voltages of the startup–shutdown stage accurately with the help of its excellent synchronization performances. Therefore, stator vibration, rotor velocity, and terminal displacements under different pulse numbers can be compared. Moreover, the two-stage two-order model is identified on the stepwise speed curves, and the fitness over 85% between the simulation and test verifies the model availability. Finally, with the optimization of the pulse number, the motor achieves 3.3 µrad in clockwise and counterclockwise direction.

关键词： ultrasonic motor stepping characteristics pulse number control synchronous acquisition system precise positioning

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航天器高精度GPS导航定位技术研究

向开恒,曲广吉

《中国工程科学》 2004年第6卷第1期页码 86-91

摘要：

将GPS测量定位技术、求解卫星轨道摄动运动的Encke方法和广义Kalman滤波技术有机地结合在一起，提出了利用GPS实现低轨道航天器高精度自主导航定位的新方法——载波相位-伪距综合动态定轨技术，解决了GPS载波相位应用中动态解模糊和跳周修复的难题。以此为基础，提出了两个航天器之间的载波相位-伪距综合差分动态相对导航技术。数值仿真分析和半物理仿真实验结果表明，所提出的动态定轨技术是可行的，对提高GPS导航定位精度的效果是显著的，并且其模型、算法和软件具有工程实用性。

关键词：航天器导航定位全球定位系统载波相位卡尔曼滤波